This is supplemental course information, designed to give you a fuller picture of the course and an expanded look at the topics covered. This is an unofficial document. The USC Course Catalog is the binding description of all university courses. Information such as books, materials covered, and the order of topics is subject to change. Please consult instructor for this semseter to get more upto date course information.
Catalog Data:
103L Introduction to Microelectronics (2, Fall) laboratory- intensive introduction to basic processes used to fabricate modern integrated circuits. Thin film growth & deposition, photolithography, integrated circuit packaging and testing. Process relationship to various disciplines of electrical engineering.
Textbook:
1) Introduction to Microelectronics Fabrication (Vol. V Modular Series on Solid State Devices),
Richard C. Jeager, Addison - Wesley Publishing Company, 2002
2) Class handout
Coordinator:
Kian Kaviani, Senior Lecturer, Electrical Engineering
Topics:
1. Silicon wafers, preparation, orientation, & defect characterization
2. Thermal oxidation of Silicon & oxidation process design.
3. Lithography, Introduction and various advanced patterning techniques.
4. Diffusion & Ion Implantation
5. Design of Integrated Resistors using diffusion processes
5. Etching (Wet & Plasma)
6. Basic electrical behaviors of MOS capacitors, IC resistors and PN diodes
Course Objectives:
To introduce the theory as well as actual hands-on approach toward microfabrications
of integrated circuits. One of the major goal of this course is to introduce freshman students to intricacies of design and actual hands-on process.
Course Outcomes:
The students will be able to:
1. Understand some of the material properties of Silicon.
2. Understand the basic theory behind thermal oxidation of Silicon and be able to design
an oxidation process.
3. Understand the basic theory behind solid –state diffusion ion implantation and ability
to design a diffusion process to achieve the targeted sheet resistance and use the sheet resistance to design an integrated circuit resistors under the given constrains..
4. Understand the electronic behavior of the building blocks of integrated circuits, like IC
resistors, PN diodes, MOS capacitors.
5. Write a final term technical report.
6. Interact with others in a group environment while maintaining the focus of each individual
project.
Laboratory Projects:
Laboratory work on an individual basis for 6 weeks, three hours each week.
Prepared by: Kian Kaviani Date: Nov. 05, 2002
